盘天下 | 免费精选资源分享

内容简介

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncert ai nty analysis-specifically, precision, matching, and relative accuracy.

下载地址

• 诚通网盘 提取码：8866
• 迅雷网盘 提取码：xe4n

本站夸克网盘精选资源合集：https://pan.quark.cn/s/936c760dd840

转载请注明出处，本文链接：https://www.80srz.com/pantx/37972.html